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Performance characteristics of an oxygen radical beam radio-frequency source
Home
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Performance characteristics of an oxygen radical beam radio-frequency source
Performance characteristics of an oxygen radical beam radio-frequency source
FI
Fumikazu Imai
Fumikazu Imai
KK
Kimio Kunimori
Kimio Kunimori
HN
Hisakazu Nozoye
Hisakazu Nozoye
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1 September 1995
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 13
(5)
,
2508-2512
https://doi.org/10.1116/1.579495
Abstract
No abstract available
Cited by 25 articles