Hydrogen Implantation into Silicon. Infra-Red Absorption Spectra and Electrical Properties
- 16 October 1985
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 91 (2), 509-522
- https://doi.org/10.1002/pssa.2210910219
Abstract
No abstract availableKeywords
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