Structural and Electrical Properties of BaTiO3 Thin Films on Si(100) Substrate by Hydrothermal Synthesis

Abstract

Crack-free, dense, polycrystalline BaTiO₃ thin films have been synthesized on the Ti-deposited Si(100) substrates with various alkaline solutions of barium salts in the temperature range from 150° C to 280° C by hydrothermal method. The fabricated BaTiO₃ thin films were found to have good adhesion on the substrate. The structural properties of thin films were investigated by X-ray diffraction (XRD) measurements. It was discussed about the crystallinity, surface morphology and interfaces of the resultant films depending on the reaction conditions such as time, temperature and solution. The thickness of the films increased with increasing temperature and time of reaction. The dielectric constants and the loss factor of thin film were measured in the frequency range from 100 Hz to 1 MHz at room temperature.