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The Confirmation of the Surface Effect upon Phosphorus Diffusion into Silicon
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The Confirmation of the Surface Effect upon Phosphorus Diffusion into Silicon
The Confirmation of the Surface Effect upon Phosphorus Diffusion into Silicon
SM
Satoru Matsumoto
Satoru Matsumoto
MY
Masayuki Yoshida
Masayuki Yoshida
TN
Tatsuya Niimi
Tatsuya Niimi
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1 November 1974
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 13
(11)
,
1899-1900
https://doi.org/10.1143/jjap.13.1899
Abstract
No abstract available
Keywords
PHOSPHORUS DIFFUSION
SURFACE EFFECT
CONFIRMATION
EFFECT UPON PHOSPHORUS
DIFFUSION INTO SILICON
Cited by 16 articles