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Direct electron-beam patterning for nanolithography
Home
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Direct electron-beam patterning for nanolithography
Direct electron-beam patterning for nanolithography
KL
K. L. Lee
K. L. Lee
MH
M. Hatzakis
M. Hatzakis
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1 November 1989
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 7
(6)
,
1941-1946
https://doi.org/10.1116/1.584652
Abstract
No abstract available
Keywords
NANOLITHOGRAPHY
DIRECT ELECTRON BEAM
ELECTRON BEAM PATTERNING
Cited by 49 articles