Chemically bonded diamondlike carbon films from ion-beam deposition

Abstract

Carbon films on a Ni(111) surface are deposited from 1–300-eV mass-selected ${\mathrm{C}}^{+}$ beams in a UHV chamber and the energy and dose dependence of the C Auger line shape is monitored. Initial deposition forms a carbide structure which is chemically bonded to the surface. The Auger line shape evolves with increasing ${\mathrm{C}}^{+}$ dose into that of a diamondlike structure for ion energies in the range 10–300 eV. Features of the x-ray and the ultraviolet photoemission spectra support this interpretation. The diamondlike films do not chemisorb ${\mathrm{O}}_2$, have a low sputtering yield with ${\mathrm{O}}^{+}$ ions, and exhibit a higher thermal stability than the carbidic films; these results are discussed in terms of a qualitative model.