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Surface Damage in InP Induced during SiO
2
Deposition by rf Sputtering
Home
Publications
Surface Damage in InP Induced during SiO
2
Deposition by rf Sputtering
Surface Damage in InP Induced during SiO
2
Deposition by rf Sputtering
KT
Kotaro Tsubaki
Kotaro Tsubaki
SA
Seigo Ando
Seigo Ando
KO
Kunishige Oe
Kunishige Oe
KS
Koichi Sugiyama
Koichi Sugiyama
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1 June 1979
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 18
(6)
,
1191-1192
https://doi.org/10.1143/jjap.18.1191
Abstract
No abstract available
Cited by 17 articles