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Effect of Oxygen on the Formation of Germanium Films
Home
Publications
Effect of Oxygen on the Formation of Germanium Films
Effect of Oxygen on the Formation of Germanium Films
RA
Robert F. Adamsky
Robert F. Adamsky
KB
Klaus H. Behrndt
Klaus H. Behrndt
WB
William T. Brogan
William T. Brogan
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1 July 1969
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 6
(4)
,
542-545
https://doi.org/10.1116/1.1315676
Abstract
No abstract available
Keywords
EFFECT OF OXYGEN
FORMATION OF GERMANIUM FILMS
OXYGEN ON THE FORMATION
Cited by 13 articles