High Q-factor inductors integrated on MCM Si substrates
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B
- Vol. 19 (3), 635-643
- https://doi.org/10.1109/96.533907
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Miniature multilayer spiral inductors for GaAs MMICsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniquesIEEE Transactions on Microwave Theory and Techniques, 1995
- Large suspended inductors on silicon and their use in a 2- mu m CMOS RF amplifierIEEE Electron Device Letters, 1993
- A 1.8-GHz monolithic LC voltage-controlled oscillatorIEEE Journal of Solid-State Circuits, 1992
- A Si bipolar monolithic RF bandpass amplifierIEEE Journal of Solid-State Circuits, 1992
- Si IC-compatible inductors and LC passive filtersIEEE Journal of Solid-State Circuits, 1990
- Design of Planar Rectangular Microelectronic InductorsIEEE Transactions on Parts, Hybrids, and Packaging, 1974
- Microstrip Transmission On Semiconductor DielectricsIEEE Transactions on Microwave Theory and Techniques, 1965