Improved Interface in Inversion-Type InP-MISFET by Vapor Etching Technique

Publisher Website

1 November 1980

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 19 (11), 2151-2156
https://doi.org/10.1143/jjap.19.2151

Abstract

No abstract available

Keywords

Cited by 47 articles