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Annealing of residual stress in silicon monoxide films
Home
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Annealing of residual stress in silicon monoxide films
Annealing of residual stress in silicon monoxide films
LH
L Holland
L Holland
TP
T Putner
T Putner
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1 October 1961
journal article
Published by
IOP Publishing
in
British Journal of Applied Physics
Vol. 12
(10)
,
581
https://doi.org/10.1088/0508-3443/12/10/128
Abstract
No abstract available
Keywords
RESIDUAL STRESS
MONOXIDE FILMS
SILICON MONOXIDE
ANNEALING OF RESIDUAL
Cited by 5 articles