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Plasma diffusion from a low pressure radio frequency source
Home
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Plasma diffusion from a low pressure radio frequency source
Plasma diffusion from a low pressure radio frequency source
C. Charles
C. Charles
RB
R. W. Boswell
R. W. Boswell
AB
A. Bouchoule
A. Bouchoule
CL
C. Laure
C. Laure
PR
P. Ranson
P. Ranson
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1 May 1991
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 9
(3)
,
661-663
https://doi.org/10.1116/1.577385
Abstract
No abstract available
Keywords
PLASMA DIFFUSION
PRESSURE RADIO
FREQUENCY SOURCE
LOW PRESSURE
RADIO FREQUENCY
Cited by 38 articles