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Diffusion Barriers in Semiconductor Contact Technology
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Diffusion Barriers in Semiconductor Contact Technology
Diffusion Barriers in Semiconductor Contact Technology
MN
M.-A. Nicolet
M.-A. Nicolet
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1 January 1997
journal article
Published by
Trans Tech Publications, Ltd.
in
Defect and Diffusion Forum
Vol. 143-147
,
1271-1284
https://doi.org/10.4028/www.scientific.net/ddf.143-147.1271
Abstract
No abstract available
Keywords
AMORPHOUS CONDUCTING FILMS
DIFFUSION BARRIER
METAL/SEMICONDUCTOR CONTACT
TERNARY NITRIDES
Cited by 12 articles