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Substrate Surface Preparation and Its Effect on Epitaxial Silicon
Home
Publications
Substrate Surface Preparation and Its Effect on Epitaxial Silicon
Substrate Surface Preparation and Its Effect on Epitaxial Silicon
PR
P. Rai-Choudhury
P. Rai-Choudhury
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1 January 1971
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 118
(7)
,
1183
https://doi.org/10.1149/1.2408277
Abstract
No abstract available
Keywords
EPITAXIAL SILICON
SURFACE PREPARATION
SUBSTRATE SURFACE
EFFECT ON EPITAXIAL
Cited by 14 articles