Langmuir probe technique for plasma parameter measurement in a medium density discharge
- 1 September 1986
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 57 (9), 2210-2217
- https://doi.org/10.1063/1.1138684
Abstract
The development of a microcomputer‐controlled electrostatic probe as a diagnostic technique is described. The technique uses cylindrical probes and the definitive theory of Laframboise to give rapid measurements of the plasma parameters in a medium density (1010 to 1012 cm−3) plasma including the fast electron density and temperature. The iterative technique described overcomes many of the problems associated with established methods of Langmuir probe analysis.Keywords
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