Local bonding structure of deuterium in single-crystal silicon determined by nuclear magnetic resonance

Abstract

Nuclear magnetic resonance was used to determine the local structure of deuterium in single-crystal silicon. The deuterium was introduced by hydrogenation and incorporated in hydrogen-induced extended planar defects. The spectrum consists of two components: a narrow doublet and a broad central line. The splitting and orientational dependence of the doublet establish that it arises from D bonded to Si with the Si-D bond aligned along the 〈111〉 directions. The broad central line is similar to that observed in hydrogenated amorphous silicon and may arise from motionally inhibited ${\mathrm{D}}_2$ in the dilated region of the hydrogen-induced platelets.