Polymer-like and hard amorphous hydrogenated carbon films prepared in an inductively coupled R.F. glow discharge
- 1 August 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 189 (2), 257-267
- https://doi.org/10.1016/0040-6090(90)90454-l
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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