Integrated grating/detector array fabricated in silicon using micromachining techniques
- 31 March 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 31 (1-3), 259-266
- https://doi.org/10.1016/0924-4247(92)80114-i
Abstract
No abstract availableKeywords
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