Magnetic properties of sputtered Co-Pt thin films
- 1 December 1983
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 54 (12), 7089-7094
- https://doi.org/10.1063/1.331977
Abstract
Magnetic properties of sputtered Co-Pt thin films, and the relation between the properties and the film microstructures were studied. Thin films obtained by sputtering a Co-Pt alloy containing 5–35 at. % Pt exhibited high coercivity. A coercivity of 1800 Oe was obtained as the maximum value for a composition of Co-20 at. % Pt, while the remanence of the film was about 9500 G. Thin film coercivity was affected by ultimate vacuum pressure before the introduction of sputtering gas. Film coercivity also increased with an increase in the average grain diameter of the films.Keywords
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