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Characterization and analysis of ZnO:Al deposited by reactive magnetron sputtering
Home
Publications
Characterization and analysis of ZnO:Al deposited by reactive magnetron sputtering
Characterization and analysis of ZnO:Al deposited by reactive magnetron sputtering
SZ
S. Zafar
S. Zafar
CF
C. S. Ferekides
C. S. Ferekides
DM
D. L. Morel
D. L. Morel
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1 July 1995
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 13
(4)
,
2177-2182
https://doi.org/10.1116/1.579539
Abstract
No abstract available
Cited by 42 articles