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Reactive Atom-Beam Etching of GaAs.
Home
Publications
Reactive Atom-Beam Etching of GaAs.
Reactive Atom-Beam Etching of GaAs.
KO
Kotaro Okamoto
Kotaro Okamoto
MI
Masayuki Iwase
Masayuki Iwase
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1 January 1987
journal article
Published by
The Vacuum Society of Japan
in
SHINKU
Vol. 30
(1)
,
22-32
https://doi.org/10.3131/jvsj.30.22
Abstract
No abstract available
Keywords
GAAS
REACTIVE ATOM BEAM
ATOM BEAM ETCHING
Cited by 2 articles