Implant diffusion with position-dependent diffusion coefficient
- 1 January 1981
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 58 (5), 133-137
- https://doi.org/10.1080/01422448108229076
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Distortion of depth profiles during sputtering: I. General description of collisional mixingNuclear Instruments and Methods, 1980
- Recoil mixing in solids by energetic ion beamsNuclear Instruments and Methods, 1980
- The depth resolution of sputter profilingApplied Physics A, 1979
- Ion-beam-induced atomic mixingJournal of Applied Physics, 1977
- Stochastic Problems in Physics and AstronomyReviews of Modern Physics, 1943