Radiation damage in silicon (001) due to low energy (60–510 eV) argon ion bombardment
- 1 November 1990
- journal article
- Published by Elsevier in Surface Science
- Vol. 237 (1-3), 213-231
- https://doi.org/10.1016/0039-6028(90)90533-e
Abstract
No abstract availableThis publication has 38 references indexed in Scilit:
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