Vacuum lithography?A completely dry lithography using plasma processing
- 1 September 1981
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 1 (3), 261-269
- https://doi.org/10.1007/bf00568834
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Plasma polymerized methyl-methacrylate as an electron-beam resistJournal of Applied Physics, 1980
- Plasma PolymerizationPublished by American Chemical Society (ACS) ,1979