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An Improved SEM Technique For Accurate Determination Of MOSFET Channel Length
Home
Publications
An Improved SEM Technique For Accurate Determination Of MOSFET Channel Length
An Improved SEM Technique For Accurate Determination Of MOSFET Channel Length
MK
Martin P. Karnett
Martin P. Karnett
RD
Robert E. Dunham
Robert E. Dunham
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1 January 1988
proceedings article
Published by
SPIE-Intl Soc Optical Eng
Vol. 0921
,
440
https://doi.org/10.1117/12.968392
Abstract
No abstract available
Keywords
CHEMICALS
FIELD EFFECT TRANSISTORS
Cited by 1 article