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A novel submicron fabrication technique
Home
Publications
A novel submicron fabrication technique
A novel submicron fabrication technique
TJ
T.N. Jackson
T.N. Jackson
NM
N.A. Masnari
N.A. Masnari
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1 January 1979
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/iedm.1979.189539
Abstract
No abstract available
Keywords
CHROMIUM
CONDUCTORS
PLANING
ION IMPLANTATION
LITHOGRAPHY
ETCHING
GALLIUM ARSENIDE
PLASMA ETCHING
ELECTRON BEAM
FABRICATION
Cited by 2 articles