CO-SPUTTERED Au-SiO2 CERMET FILMS
- 1 February 1967
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 10 (3), 86-88
- https://doi.org/10.1063/1.1754863
Abstract
Au‐SiO2 thin‐film cermets have been deposited by simultaneously dc sputtering Au and rf sputtering SiO2. The electrical resistivity varies exponentially with Au concentration, and the microstructure shows discontinuous networks of Au and SiO2.Keywords
This publication has 2 references indexed in Scilit:
- Stable, High-Range, Cr/SiO Film ResistorsIEEE Transactions on Component Parts, 1964
- Electrical Conduction Mechanism in Ultrathin, Evaporated Metal FilmsJournal of Applied Physics, 1962