Calculation of the spatial distribution of ionization density in a material due to electron beam irradiation
- 29 February 1980
- journal article
- Published by Elsevier in Materials Science and Engineering
- Vol. 42, 39-43
- https://doi.org/10.1016/0025-5416(80)90007-5
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Auger electron spectroscopy applications of a new integral field emission gun with a small spot sizeThin Solid Films, 1979
- Preparation of a sharply defined boundary between two elements for x‐ray microanalysisScanning, 1979
- Physical background of electron backscatteringScanning, 1978
- On the influence of backscattered electrons on the lateral resolution in scanning auger microscopyApplied Physics A, 1977
- A simple Monte Carlo method for simulating electron-solid interactions and its application to electron probe microanalysisJournal of Physics D: Applied Physics, 1977
- Cross sections for ionization of inner-shell electrons by electronsReviews of Modern Physics, 1976
- Beam-diameter correction of x-ray intensity profile over small diffusion zonesJournal of Applied Physics, 1975
- Multiple scattering of 5-30 keV electrons in evaporated metal films II: Range-energy relationsBritish Journal of Applied Physics, 1964
- Back Scattering of ElectronsJournal of Applied Physics, 1961