Investigation of elastic properties of ZnO films by Brillouin scattering

Abstract

The elastic properties of ZnO films have been investigated by means of the Brillouin scattering technique. Measurements were made of the phase velocity of surface phonons propagating on ZnO films ≊0.2 μm thick, deposited on both Si and Al2O3 substrates. A comparison of the experimental results with theoretical predictions shows that the elastic properties of the films, although appreciably different from those of the bulk material, are fairly close, however, to the properties observed in films almost two orders of magnitude thicker.