Crystallographic and optical study of ZrO2 partially and totally stabilized with Y2O3

Abstract

We have studied the effects of the O₂ concentration in the argon sputtering gas and the substrate temperature on the structural and optical properties of the totally stabilized zircone (TSZ) and partially stabilized zircone (PSZ) materials comparatively. In the TSZ material, the presence of molecules of the Y₂O₃ dopant reduces the effect of different deposition conditions on the film structure in regard to the PSZ material.