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Plasma-assisted deposition and epitaxy of GaAs films
Home
Publications
Plasma-assisted deposition and epitaxy of GaAs films
Plasma-assisted deposition and epitaxy of GaAs films
TH
T. Hariu
T. Hariu
KT
K. Takenaka
K. Takenaka
SS
S. Shibuya
S. Shibuya
YK
Y. Komatsu
Y. Komatsu
YS
Y. Shibata
Y. Shibata
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19 June 1981
journal article
Published by
Elsevier
in
Thin Solid Films
Vol. 80
(1-3)
,
235-239
https://doi.org/10.1016/0040-6090(81)90227-3
Abstract
No abstract available
Keywords
EPITAXIAL
THIN FILMS
PLASMA ASSISTED DEPOSITION
GAAS FILMS
FILMS AMORPHOUS
POLYCRYSTALLINE GAAS
Cited by 17 articles