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Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure
Home
Publications
Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure
Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure
US
U.I. Schmidt
U.I. Schmidt
TH
T. Haage
T. Haage
BS
B. Schröder
B. Schröder
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1 July 1995
journal article
Published by
Trans Tech Publications, Ltd.
in
Solid State Phenomena
Vol. 44-46
,
195-226
https://doi.org/10.4028/www.scientific.net/ssp.44-46.195
Abstract
No abstract available
Keywords
DENSITY DETERMINATION
ELLIPSOMETRIC DATA INTERPRETATION
INITIAL TRANSIENT STAGE OF DISCHARGE
KINETIC ELLIPSOMETRY
LASER LIGHT SCATTERING
PARTICLE FORMATION
PROCESS CONTROL
SOLAR CELL OPTIMISATION
SPECTROSCOPIC ELLIPSOMETRY (SE)
TETRAHEDRON MODEL
Cited by 5 articles