Reactive high rate sputtering of oxides
- 1 December 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 86 (2-3), 175-182
- https://doi.org/10.1016/0040-6090(81)90286-8
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Optical layers produced by sputteringThin Solid Films, 1981
- Sputtering of Dielectrics by High-Frequency FieldsJournal of Applied Physics, 1962