Focusing effects in sputter deposition
- 1 November 1971
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 8 (5), R41-R45
- https://doi.org/10.1016/0040-6090(71)90087-3
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering SystemReview of Scientific Instruments, 1970