Selective reactive ion etching of GaAs on AlGaAs using CCl2F2 and He

Publisher Website

1 January 1988

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology B

Vol. 6 (1), 77-81
https://doi.org/10.1116/1.584056

Abstract

No abstract available

Keywords

REACTIVE ION ETCHING

Cited by 35 articles