A wideband SAW convolver utilizing Sezawa waves in the metal-ZnO-SiO2-Si configuration

Abstract
A monolithic metal‐ZnO‐SiO2‐Si SAW convolver has been developed which not only displays the advantages of the monolithic configuration, but also possesses, due to utilization of high coupling Sezawa waves, a wide bandwidth heretofore only exhibited by LiNbO3 devices. We report here a bandwidth of 30 MHz at an input frequency of 225 MHz with a terminal efficiency of −56.9 dBm. The device displays an electromechanical coupling (Δv/v) of 0.019 which is the largest value yet reported for a ZnO device.