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Selective resputtering-induced anisotropy in amorphous films
Home
Publications
Selective resputtering-induced anisotropy in amorphous films
Selective resputtering-induced anisotropy in amorphous films
RG
R. J. Gambino
R. J. Gambino
JC
J. J. Cuomo
J. J. Cuomo
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1 March 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(2)
,
296-301
https://doi.org/10.1116/1.569574
Abstract
No abstract available
Keywords
AMORPHOUS FILMS
INDUCED ANISOTROPY
SELECTIVE RESPUTTERING INDUCED
Cited by 77 articles