Uniform beam profiles of 5 cm convex gridded ion beam source
- 1 November 1995
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 66 (11), 5379-5380
- https://doi.org/10.1063/1.1146475
Abstract
A Kaufman‐type 5 cm convex gridded ion‐beam source is characterized in terms of angle‐resolved ion‐beam current density and beam uniformity at various discharge currents, electromagnet currents, and acceleration potentials.Keywords
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