Dual electron beam evaporator for the preparation of composition-modulated structures

Abstract
We describe the construction of an UHV evaporator with two electron beam guns and a heated substrate turntable which is used for the preparation of composition-modulated structures (CMS’s). Using a suitably controlled stepping motor, up to 20 different CMS’s can be prepared in the same run. The system has been used to deposit V/Fe CMS’s and preliminary structural measurements indicate the samples are of high quality.