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Dc Electroplating Of Sub-Micron Gold Patterns On X-Ray Masks
Home
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Dc Electroplating Of Sub-Micron Gold Patterns On X-Ray Masks
Dc Electroplating Of Sub-Micron Gold Patterns On X-Ray Masks
GG
G. E. Georgiou
G. E. Georgiou
CJ
C A. Jankoski
C A. Jankoski
TP
T A. Palumbo
T A. Palumbo
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18 June 1984
proceedings article
Published by
SPIE-Intl Soc Optical Eng
https://doi.org/10.1117/12.942333
Abstract
No abstract available
Keywords
GOLD
MANUFACTURING
X RAY LITHOGRAPHY
ELECTROPLATING
ABSORPTION
TANTALUM
ETCHING
Cited by 5 articles