Monochromator for the Extreme Ultraviolet

Abstract

The off‐plane Eagle mounting has distinct advantages over other types in the construction of grating monochromators for the extreme ultraviolet. A description is given of an adaptation of that principle, employing a Rowland grating movement and a simple drive mechanism to achieve good resolution with little mechanical complication. Differential pumping in three stages allows operation without windows and still attains pressures in the 10⁻⁹ Torr range in the measuring chamber.