Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Mean free path of negative ions in diode sputtering
Home
Publications
Mean free path of negative ions in diode sputtering
Mean free path of negative ions in diode sputtering
JH
J. M. E. Harper
J. M. E. Harper
JC
J. J. Cuomo
J. J. Cuomo
RG
R. J. Gambino
R. J. Gambino
HK
H. R. Kaufman
H. R. Kaufman
RR
R. S. Robinson
R. S. Robinson
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 July 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(4)
,
1597-1600
https://doi.org/10.1116/1.569816
Abstract
No abstract available
Keywords
NEGATIVE IONS
DIODE SPUTTERING
FREE PATH
MEAN FREE
PATH OF NEGATIVE
IONS IN DIODE
Cited by 38 articles