Determination of the atomic nitrogen flux from a radio frequency plasma nitride source for molecular beam epitaxy systems
- 1 November 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (6), 3434-3437
- https://doi.org/10.1116/1.581498
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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