Plasma immersion ion implantation—the role of diffusion
- 1 October 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 59 (1-3), 267-273
- https://doi.org/10.1016/0257-8972(93)90095-6
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Microstructure and tribological behaviour of plasma immersion ion implanted tool steelsSurface and Coatings Technology, 1992
- Plasma immersion ion implantation: duplex layers from a single processSurface and Coatings Technology, 1992
- Plasma surface engineering of low alloy steelMaterials Science and Engineering: A, 1991
- Plasma immersion ion implantation of steelsMaterials Science and Engineering: A, 1991
- Enhanced plasma nitriding at low pressures: A comparative study of d.c. and r.f. techniquesSurface and Coatings Technology, 1990
- Plasma immersion ion implantation using plasmas generated by radio frequency techniquesApplied Physics Letters, 1988
- Excited states of plasmas for steel surface nitriding and TiN depositionPublished by Walter de Gruyter GmbH ,1988
- Plasma source ion-implantation technique for surface modification of materialsJournal of Applied Physics, 1987
- New method to measure plasma potential with emissive probesReview of Scientific Instruments, 1983