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A step-and-repeat x-ray exposure system for 0.5 μm pattern replication
Home
Publications
A step-and-repeat x-ray exposure system for 0.5 μm pattern replication
A step-and-repeat x-ray exposure system for 0.5 μm pattern replication
TH
T. Hayasaka
T. Hayasaka
SI
S. Ishihara
S. Ishihara
HK
H. Kinoshita
H. Kinoshita
NT
N. Takeuchi
N. Takeuchi
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1 November 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 3
(6)
,
1581-1586
https://doi.org/10.1116/1.582942
Abstract
No abstract available
Cited by 9 articles