Tc of c-Axis-Oriented Y-Ba-Cu-O Films Prepared by CVD

Abstract
YBa2Cu3O7-x thin films (0.8 µm in thickness) with c-axis orientation were prepared at 900°C on yttria-stabilized zirconia substrates by chemical vapor deposition using metal chelates as source materials. The onset and completion of the superconductive transition occurred at 89 K and 80 K, respectively, for the film that received in situ oxygen treatment. The oxygen-treated film had metallic resistivity and the resistance ratio (R273 K / R100 K) was 2.