Gas release studies of silicon implanted with low energy He+and Kr+ions
- 1 September 1971
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 10 (4), 227-233
- https://doi.org/10.1080/00337577108231090
Abstract
A silicon (111) surface was bombarded in U.H.V. with low energy (≤1 keV) He+ and Kr+ ions. The ions retained within the solid were subsequently desorbed into a closed volume, by raising the target temperature linearly, with respect to time, at a rate of 30°KS−1. The differentiated signal in a mass spectrometer provided desorption spectra. Two main release stages were noted, at ∼400°K and ∼1000°K. It is suggested that the former is related to divacancy motion, modified by the presence of gas and the latter to the annealing of bombardment-induced amorphousness. Helium was injected into a target which had been amorphized by prebombardment with krypton ions. The helium was largely released in the ∼400 °K stage and it was deduced that helium diffused through an amorphous layer at temperatures well below those required to anneal the amorphousness.Keywords
This publication has 16 references indexed in Scilit:
- Radiation damage enhanced trapping of low-energy He+ions in rheniumRadiation Effects, 1970
- Ion bombardment induced phase transformations and inert gas mobility in the semiconductors Ge, Si, and GaAsRadiation Effects, 1970
- DIRECT EVIDENCE OF DIVACANCY FORMATION IN SILICON BY ION IMPLANTATIONApplied Physics Letters, 1969
- On the mechanisms of diffusion in inert-gas bombarded solids. Diffusion theory for discrete media, part VJournal of Nuclear Materials, 1969
- A gas-release study of the annealing of bombardment-induced disorder∗ (studies on bombardment-induced disorder—I)Journal of Physics and Chemistry of Solids, 1969
- Investigations into the mechanism of trapping of inert gas ions in polycrystalline tungstenVacuum, 1967
- 1.8-, 3.3-, and 3.9-μ Bands in Irradiated Silicon: Correlations with the DivacancyPhysical Review B, 1966
- Defects in Irradiated Silicon: Electron Paramagnetic Resonance of the DivacancyPhysical Review B, 1965
- Thermal resolution of desorption energy spectraVacuum, 1962
- Thermal desorption of gasesVacuum, 1962