Sputtering of PZT thin films for surface micromachined IR-detector arrays
- 1 September 1999
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 25 (1-4), 1-11
- https://doi.org/10.1080/10584589908210154
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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