Current and Voltage Measurements in the Gaseous Electronics Conference Rf Reference Cell
Open Access
- 1 July 1995
- journal article
- Published by National Institute of Standards and Technology (NIST) in Journal of Research of the National Institute of Standards and Technology
- Vol. 100 (4), 341-351
- https://doi.org/10.6028/jres.100.026
Abstract
Measurements of the electrical characteristics of discharges in the Gaseous Electronics Conference Radio-Frequency Reference Cell are reviewed here. Topics include: common sources of error in the measurements; comparisons of current and voltage data among GEC cells; the effects of gas impurities, surface conditions and the external circuitry on the reproducibility of the electrical characteristics; and comparisons of current and voltage data with results of other measurements.Keywords
This publication has 2 references indexed in Scilit:
- Subharmonics and rf-plasma sheathsPhysical Review Letters, 1993
- Dynamic model of the electrode sheaths in symmetrically driven rf dischargesPhysical Review A, 1990