Patterning of monolayers of crystalline S-layer proteins on a silicon surface by deep ultraviolet radiation
- 28 February 1997
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 35 (1-4), 297-300
- https://doi.org/10.1016/s0167-9317(96)00130-x
Abstract
No abstract availableKeywords
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- Large-scale reconstitution of crystalline bacterial surface layer proteins at the air-water interface and on lipid filmsThin Solid Films, 1994
- Self-assembly: its use in at-the-surface imaging schemes for microstructure fabrication in resist filmsMicroelectronic Engineering, 1994
- Lithographic patterning of self-assembled filmsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Deep ultraviolet patterning of monolayer films for high resolution lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991